FOREVER SEALS FFKM O-Rings Replace DuPont Kalrez in Semiconductor Manufacturing

With the rapid development of the global semiconductor industry, the demand for high-performance sealing components in extreme manufacturing environments is increasingly stringent. Semiconductor processes such as plasma etching, chemical vapor deposition (CVD), and physical vapor deposition (PVD) involve high temperatures, strong corrosive gases (such as hydrogen fluoride, nitrogen trifluoride), and ultra-high vacuum conditions, which put forward extremely high requirements for the stability, corrosion resistance, and low outgassing performance of sealing materials. DuPont Kalrez FFKM O-rings have long been regarded as the benchmark in the semiconductor industry, but their high cost and long delivery cycle have become pain points for many semiconductor manufacturers. To address these challenges, FOREVER SEALS has launched a high-performance FFKM (perfluoroelastomer) O-ring series, which has successfully achieved direct substitution for DuPont Kalrez in multiple semiconductor production lines, while ensuring product quality and reducing overall operating costs.

Background of the Customer: A leading global semiconductor manufacturer specializing in the production of 8-inch and 12-inch wafers. Its production process involves harsh working conditions, including continuous high temperatures up to 280℃, exposure to corrosive plasma gases (NF₃, CF₄), and ultra-high vacuum environments (1.33×10⁻⁷ Pa). The customer originally used DuPont Kalrez 7075 and Kalrez 8900 FFKM O-rings for sealing in etching machines, CVD equipment, and ultra-pure fluid delivery valves. However, due to the high procurement cost (about 30% higher than the market average) and the delivery cycle of 4-6 weeks, which often affected the normal operation of the production line, the customer urgently needed a high-performance alternative product with better cost-effectiveness and shorter delivery time.

Challenges of the Application: The sealing components in semiconductor manufacturing must meet the following core requirements to ensure the stability of the production process and the quality of wafers: First, excellent chemical resistance, which can resist corrosion by more than 1600 kinds of chemicals, including strong acids, strong alkalis, organic solvents, and reactive plasma gases, without structural damage or performance degradation. Second, superior high-temperature stability, which can maintain stable elasticity and sealing performance in the temperature range of -40℃ to 320℃, with a compression set of less than 30% after 72 hours at 200℃. Third, ultra-low outgassing and low particle generation, which can avoid contaminating the ultra-clean environment of semiconductor manufacturing and ensure the yield of wafers. Fourth, precise dimensional accuracy, which meets the requirements of AS-568 and GB/T 3452.1-2005 standards, ensuring a perfect fit with equipment grooves and avoiding leakage.

FOREVER SEALS Solution: After in-depth research on the customer's production process and technical requirements, FOREVER SEALS recommended FFKM O-ring series, which are specially developed for the semiconductor industry. These two products are formulated with high-purity perfluoroelastomer raw materials and adopt advanced molding and post-processing technologies, aiming to achieve performance parity with DuPont Kalrez 7075 and Kalrez 8900, while breaking the monopoly of imported products in terms of cost and delivery cycle.

Performance Comparison and Substitution Verification: Before formal mass application, the customer conducted a 3-month comparative test between FOREVER SEALS FS series O-rings and DuPont Kalrez O-rings in the same production line and working conditions. The test results showed that the two series of products have equivalent or even better performance in key indicators:

1. Chemical Resistance: Both FOREVER SEALS FFKM and DuPont Kalrez 7075/8900 can resist corrosion by NF₃, CF₄, hydrogen fluoride, and other corrosive gases, and there is no obvious volume change or surface damage after 1000 hours of immersion in various semiconductor process chemicals. The test results meet the requirements of the semiconductor industry's standard T/UNP XXXX—2024.

2. High-Temperature Stability: In the high-temperature aging test at 280℃ for 1000 hours, the hardness change rate of FOREVER SEALS O-rings is within ±5%, the tensile strength retention rate is not less than 82%, and the compression set is 28%, which is slightly better than DuPont Kalrez's 30%. It can maintain stable sealing performance in long-term high-temperature working conditions without hardening or brittleness.

3. Low Outgassing and Particle Generation: The outgassing rate of FOREVER SEALS O-rings is less than 1×10⁻⁶ g/cm²·s, which is lower than the industry standard of 5×10⁻⁶ g/cm²·s. In the plasma etching environment, the particle generation is less than 5 particles per hour, which is equivalent to DuPont Kalrez, effectively avoiding wafer contamination and ensuring the yield of products.

4. Dimensional Accuracy: The dimensional tolerance of FOREVER SEALS O-rings strictly complies with AS-568 and GB/T 3452.1-2005 standards, with an inner diameter tolerance of -1~+2 mm and a cross-sectional diameter tolerance of -0.2~+0.5 mm, which is completely consistent with DuPont Kalrez. It can be directly installed and used without modifying the equipment groove, realizing seamless substitution.

In addition to the equivalent performance, FOREVER SEALS also has obvious advantages in cost and delivery cycle: the procurement cost of FS series O-rings is 25%-30% lower than that of DuPont Kalrez; the delivery cycle is shortened to 7-10 working days, which is 70% shorter than the 4-6 weeks of DuPont Kalrez, effectively solving the customer's pain points of high cost and long delivery cycle.

Application Effect: After 6 months of mass application, the customer's production line has achieved stable operation. The FOREVER SEALS FFKM O-rings have no leakage, no performance degradation, and no wafer contamination caused by sealing components. The average service life of the O-rings is 12 months, which is the same as that of DuPont Kalrez. At the same time, the customer's annual procurement cost of sealing components has been reduced by about 28%, and the downtime caused by insufficient supply of sealing components has been reduced by 90%, greatly improving production efficiency and economic benefits.

Conclusion: FOREVER SEALS FFKM O-rings have achieved seamless substitution for DuPont Kalrez in the semiconductor industry through their excellent performance, precise dimensional accuracy, favorable cost-effectiveness, and efficient delivery. They not only meet the strict requirements of semiconductor extreme manufacturing environments but also help manufacturers reduce operating costs and improve production efficiency. As a professional manufacturer of high-performance sealing components, FOREVER SEALS will continue to focus on the technological innovation of semiconductor sealing materials, providing more reliable, cost-effective, and customized sealing solutions for the global semiconductor industry, and promoting the localized development of semiconductor core components.